Shutdown stsetch SNF 2006-03-10 13:43:32: Gate valve times out.

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Mar 12 09:44:48 PST 2006


Secured communication connector and swapped DC power cables.  Cycled a wafer in and out of the chamber for over 1 hour with no problems.




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