Problem stsetch SNF 2006-03-20 01:51:42: Serial Communication Fault...

kkumar at snf.stanford.edu kkumar at snf.stanford.edu
Mon Mar 20 01:51:43 PST 2006


I received a 'Serial Communication Fault' at the end of my process. When trying to retrieve my wafer, I got two alarms - 'ICP Not Available' & 'Excessive Lock Pump Down Time' alarms. I immediately disabled the tool. My wafer is still in the chamber.




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