From cbaxter at snf.stanford.edu Mon May 1 13:18:14 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 1 May 2006 13:18:14 -0700 Subject: Problem stsetch SNF 2006-04-29 09:43:54: a wafer stuck in the chamber.Can't unload. Message-ID: wafer was recovered From jackson at snf.stanford.edu Tue May 2 23:27:30 2006 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Tue, 2 May 2006 23:27:30 -0700 Subject: Problem stsetch SNF 2006-05-02 23:27:28: sts "serial communication Error" Message-ID: With one minute of time on etch process, the paddle tried to go into the chamber to retrieve my wafer...the chamber time had not stopped and has not pump/purged. When the paddle finally stopped and returned to the correct position in the load lock...Eric was unable to unload my wafer due to "ICP not available" MY wafer is still in the chamber in the wafer holder.. From ericp at snf.stanford.edu Wed May 3 00:38:49 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 3 May 2006 00:38:49 -0700 Subject: Comment stsetch SNF 2006-05-03 00:38:48: Wafer cleared Message-ID: Got the wafer out, and it seems to be communicating now. From eenriquez at snf.stanford.edu Wed May 3 19:15:06 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 May 2006 19:15:06 -0700 Subject: Comment stsetch SNF 2006-04-06 12:45:55: free from 16:30 to 18:30 Message-ID: From eenriquez at snf.stanford.edu Wed May 3 19:15:15 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 May 2006 19:15:15 -0700 Subject: Comment stsetch SNF 2006-04-07 11:02:17: free from 16:30 to 19:00 Message-ID: From eenriquez at snf.stanford.edu Wed May 3 19:15:48 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 May 2006 19:15:48 -0700 Subject: Comment stsetch SNF 2006-04-29 18:04:04: Wafer is removed. Thanks Message-ID: From eenriquez at snf.stanford.edu Wed May 3 23:52:17 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 May 2006 23:52:17 -0700 Subject: Problem stsetch SNF 2006-05-02 23:27:28: sts "serial communication Error" Message-ID: Adjusted power supply from 37 volts. to 36.5 From xzhuan1 at snf.stanford.edu Sat May 6 18:22:02 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sat, 6 May 2006 18:22:02 -0700 Subject: Problem stsetch SNF 2006-05-06 18:22:01: icp failure Message-ID: icp not ready, cannot load wafer into etch chamber From cbaxter at snf.stanford.edu Mon May 8 08:47:42 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 8 May 2006 08:47:42 -0700 Subject: Problem stsetch SNF 2006-05-06 18:22:01: icp failure Message-ID: ramped down turbo and reboot system. From shwong at snf.stanford.edu Tue May 23 16:41:19 2006 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Tue, 23 May 2006 16:41:19 -0700 Subject: Problem stsetch SNF 2006-05-23 16:41:17: wafer stuck inside.. ICP communication error Message-ID: From latta at snf.stanford.edu Tue May 23 18:27:02 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 23 May 2006 18:27:02 -0700 Subject: Comment stsetch SNF 2006-04-09 19:57:39: Re: software error -- Message-ID: noted From latta at snf.stanford.edu Tue May 23 18:27:11 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 23 May 2006 18:27:11 -0700 Subject: Comment stsetch SNF 2006-04-16 01:51:01: cleared broken wafer Message-ID: noted From latta at snf.stanford.edu Tue May 23 18:27:26 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 23 May 2006 18:27:26 -0700 Subject: Comment stsetch SNF 2006-05-03 00:38:48: Wafer cleared Message-ID: noted From eenriquez at snf.stanford.edu Tue May 23 19:31:18 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 May 2006 19:31:18 -0700 Subject: Problem stsetch SNF 2006-05-23 16:41:17: wafer stuck inside.. ICP communication error Message-ID: Reset the system and retrieve wafer. Cycled wafers without any problems. From kupnik at snf.stanford.edu Thu May 25 12:33:12 2006 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Thu, 25 May 2006 12:33:12 -0700 Subject: Problem stsetch SNF 2006-05-25 12:33:11: sts gave 2 error messages Message-ID: Thursday 1:30 am - first it said plate power out of tolerance, hold process -then it said excessive pump down time error Mario From cbaxter at snf.stanford.edu Thu May 25 13:49:06 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 25 May 2006 13:49:06 -0700 Subject: Problem stsetch SNF 2006-05-25 12:33:11: sts gave 2 error messages Message-ID: icp lost communication. reboot system. From xzhuan1 at snf.stanford.edu Wed May 31 18:14:01 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 31 May 2006 18:14:01 -0700 Subject: Problem stsetch SNF 2006-05-31 18:14:00: cannot vent lock chamber Message-ID: My device wafer is stuck in lock chamber. Elmer please rescue the wafer! From eenriquez at snf.stanford.edu Wed May 31 19:31:14 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 May 2006 19:31:14 -0700 Subject: Problem stsetch SNF 2006-05-31 18:14:00: cannot vent lock chamber Message-ID: Vented the load lock and placed user's wafer in his box. Cycled wafers with no problems.