Comment stsetch SNF 2006-11-16 18:48:19: tests ok

ericp at snf.stanford.edu ericp at snf.stanford.edu
Thu Nov 16 18:48:20 PST 2006


I loaded a dummy, and it etches fine.  
I can only guess that the prev. problem was due 
to a backside He high leakrate. 
The only thing I notice is that the wafer is loading 
a little off-center, which could contribute to a He flow 
problem.  




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