Comment stsetch SNF 2006-11-17 13:55:38: coil power out of tolerance message

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Nov 28 13:07:25 PST 2006


This is due to the He leak rate being too high.  Yes, I know that it doesn't say that, but if the He leak is too high the plasma will not strike.
Usually this is due to the wafer.  Either it has punched through in an area or there is something on the back oif the substrate causing a leaky seal with the chuck.
Please see Elmer's comment of 10 Oct 2006.




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