From kkumar at snf.stanford.edu Sun Oct 1 05:01:24 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Sun, 1 Oct 2006 05:01:24 -0700 Subject: Problem stsetch SNF 2006-10-01 05:01:24: Wafer in chamber Message-ID: i am unable to unload my wafer from the chamber. excessive lock pump down time alarm occurs when i try to unload it. From ericp at snf.stanford.edu Sun Oct 1 12:56:18 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 1 Oct 2006 12:56:18 -0700 Subject: Comment stsetch SNF 2006-10-01 12:56:17: KKUMAR's wafer is out- system up Message-ID: Prev problem has been fixed, or at least buried. The machine seems to be locking up often, for no apparent reason. From ericp at snf.stanford.edu Sun Oct 1 13:49:26 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 1 Oct 2006 13:49:26 -0700 Subject: Problem stsetch SNF 2006-10-01 13:49:25: locking up on almost every wafer Message-ID: It locked up again, this time in the middle of a run. The unusual thing about this lockup is that the wafer chuck lowered out of the process position, even though it was supposedly in the middle of an etch. -Eric From eenriquez at snf.stanford.edu Mon Oct 2 11:24:16 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Oct 2006 11:24:16 -0700 Subject: Problem stsetch SNF 2006-10-01 13:49:25: locking up on almost every wafer Message-ID: Ran several wafers using the deep recipe with no problems. Changed the deep recipe time from 0 to 10 min. We will continue to monitor the system. According to the error log, the system lost communication with the process controller about 4 times last Sunday but it has been OK since then. From eenriquez at snf.stanford.edu Mon Oct 2 11:24:46 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Oct 2006 11:24:46 -0700 Subject: Comment stsetch SNF 2006-10-01 12:56:17: KKUMAR's wafer is out- system up Message-ID: Ran several wafers using the deep recipe with no problems. Changed the deep recipe time from 0 to 10 min. We will continue to monitor the system. According to the error log, the system lost communication with the process controller about 4 times last Sunday but it has been OK since then. From eenriquez at snf.stanford.edu Mon Oct 2 11:25:05 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Oct 2006 11:25:05 -0700 Subject: Problem stsetch SNF 2006-10-01 05:01:24: Wafer in chamber Message-ID: Ran several wafers using the deep recipe with no problems. Changed the deep recipe time from 0 to 10 min. We will continue to monitor the system. According to the error log, the system lost communication with the process controller about 4 times last Sunday but it has been OK since then. From kkumar at snf.stanford.edu Tue Oct 3 01:59:16 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Tue, 3 Oct 2006 01:59:16 -0700 Subject: Problem stsetch SNF 2006-10-03 01:59:16: wafer stuck in chamber (again) Message-ID: lock excessive pump down time alarm. lock pressure will not go down below about 250mTorr. processed wafer still in chamber. From eenriquez at snf.stanford.edu Tue Oct 3 07:36:03 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Oct 2006 07:36:03 -0700 Subject: Problem stsetch SNF 2006-10-03 01:59:16: wafer stuck in chamber (again) Message-ID: Loadlock roughing valve was not opening. Reset the loadlock controller. From kkumar at snf.stanford.edu Tue Oct 3 08:55:23 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Tue, 3 Oct 2006 08:55:23 -0700 Subject: Shutdown stsetch SNF 2006-10-03 08:55:22: 2 problems Message-ID: 1. coil power going out of tolerance 2. excessive lock pump down time alarm partially processed wafer still stuck in chamber. From cbaxter at snf.stanford.edu Tue Oct 3 09:57:06 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Oct 2006 09:57:06 -0700 Subject: Shutdown stsetch SNF 2006-10-03 08:55:22: 2 problems Message-ID: StS f/service reset the tool.. From iwjung at snf.stanford.edu Wed Oct 4 02:08:32 2006 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Wed, 4 Oct 2006 02:08:32 -0700 Subject: Shutdown stsetch SNF 2006-10-04 02:08:32: ICP serial communication failure alarm Message-ID: error trying to transfer etched wafers back to load chamber From cbaxter at snf.stanford.edu Wed Oct 4 14:10:01 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Oct 2006 14:10:01 -0700 Subject: Shutdown stsetch SNF 2006-10-04 02:08:32: ICP serial communication failure alarm Message-ID: icp module locked up due rf tolerance error. f/service re-boot system and tested w/out problem. From kkumar at snf.stanford.edu Wed Oct 4 22:31:42 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Wed, 4 Oct 2006 22:31:42 -0700 Subject: Problem stsetch SNF 2006-10-04 22:31:41: Grassing & then Not Processing Message-ID: 1. On a 90micron etch of large features, standard DEEP recipe caused grass as tall as the etch. Holder was not used. 2. When I tried to etch the next wafer, it would not go beyond the pumpdown step. It hung at 00:00:00 at the pumpdown step. No alarm dialog popped up. It just froze there. From kkumar at snf.stanford.edu Wed Oct 4 22:58:23 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Wed, 4 Oct 2006 22:58:23 -0700 Subject: Comment stsetch SNF 2006-10-04 22:58:22: Reg. grassing Message-ID: I think my wafer could have been dirty which caused the PR resputtering. This could account for the pillars I was seeing. From latta at snf.stanford.edu Fri Oct 6 09:24:25 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Oct 2006 09:24:25 -0700 Subject: Comment stsetch SNF 2006-10-04 22:58:22: Reg. grassing Message-ID: Litho problem From latta at snf.stanford.edu Fri Oct 6 09:27:27 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Oct 2006 09:27:27 -0700 Subject: Problem stsetch SNF 2006-10-04 22:31:41: Grassing & then Not Processing Message-ID: From latta at snf.stanford.edu Fri Oct 6 09:28:54 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Oct 2006 09:28:54 -0700 Subject: Comment stsetch SNF 2006-09-20 17:44:39: Etcher is back in service. Message-ID: From kkumar at snf.stanford.edu Fri Oct 6 21:49:41 2006 From: kkumar at snf.stanford.edu (kkumar at snf.stanford.edu) Date: Fri, 6 Oct 2006 21:49:41 -0700 Subject: Problem stsetch SNF 2006-10-06 21:49:40: won't unload wafer Message-ID: stuck in unload step. however, no alarm dialog has popped up for the last 1/2 hr. processed wafer still in chamber. From cbaxter at snf.stanford.edu Sun Oct 8 10:18:23 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Oct 2006 10:18:23 -0700 Subject: Problem stsetch SNF 2006-10-06 21:49:40: won't unload wafer Message-ID: System locked up, I had a hard time rebooting the tool. Power down the tool a couple of time and finally initialize ok. I manually removed the wafer inside the chamber. From axiu at snf.stanford.edu Mon Oct 9 12:21:49 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Mon, 9 Oct 2006 12:21:49 -0700 Subject: Problem stsetch SNF 2006-10-09 12:21:48: no plasma, no etch Message-ID: shows message " coil power out of tolerance ". From cbaxter at snf.stanford.edu Mon Oct 9 13:11:49 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Oct 2006 13:11:49 -0700 Subject: Problem stsetch SNF 2006-10-09 12:21:48: no plasma, no etch Message-ID: Elmer loaded a dummy wafer and strike plasma w/out problem. From axiu at snf.stanford.edu Mon Oct 9 14:01:29 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Mon, 9 Oct 2006 14:01:29 -0700 Subject: Comment stsetch SNF 2006-10-09 14:01:28: no plasma, no etch Message-ID: It happens when using Al holder. It shows "coil power out of tolerance". From axiu at snf.stanford.edu Mon Oct 9 14:02:31 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Mon, 9 Oct 2006 14:02:31 -0700 Subject: Problem stsetch SNF 2006-10-09 14:02:30: no plasma, no etch Message-ID: it happens when using Al holder with rubber ring. It shows "coil power out of tolerance." From eenriquez at snf.stanford.edu Tue Oct 10 07:35:24 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Oct 2006 07:35:24 -0700 Subject: Comment stsetch SNF 2006-10-10 07:35:23: no plasma caused by hi He leak rate Message-ID: The RF generators are interlocked so that they do not turn on when the He leak rate is too high. We still need to decide if we want to by-pass this interlock or adjust the He flow. From axiu at snf.stanford.edu Tue Oct 10 15:56:21 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Tue, 10 Oct 2006 15:56:21 -0700 Subject: Problem stsetch SNF 2006-10-10 15:56:20: coil power out of tolerance Message-ID: No plasma, no etch when using Al holder. Previous user faced the same problem. From cbaxter at snf.stanford.edu Thu Oct 12 12:55:33 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Oct 2006 12:55:33 -0700 Subject: Problem stsetch SNF 2006-10-10 15:56:20: coil power out of tolerance Message-ID: Elmer cleaned up the broken inside the chamber and ran o2 plasma. From seoung at snf.stanford.edu Fri Oct 13 19:19:01 2006 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Fri, 13 Oct 2006 19:19:01 -0700 Subject: Problem stsetch SNF 2006-10-13 19:19:00: Wafer inside Message-ID: 5 minutes after I started a process, plasma disappeared. Then, I aborted the process. But I can not unload the wafer and it is still inside the chamber. I used the wafer holder. From ericp at snf.stanford.edu Fri Oct 13 21:50:12 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 13 Oct 2006 21:50:12 -0700 Subject: Comment stsetch SNF 2006-10-13 21:50:12: Wafer unloaded, system ok (for now) Message-ID: Seong's wafer is out, system is responding normally for the moment..... From yoonjin at snf.stanford.edu Sat Oct 14 17:49:38 2006 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Sat, 14 Oct 2006 17:49:38 -0700 Subject: Problem stsetch SNF 2006-10-14 17:49:38: wafer inside again Message-ID: 20 minutes after I started a process, plasma disappeared. Then, I aborted the process. But I can not unload the wafer and it is still inside the chamber. I used the wafer holder. From ericp at snf.stanford.edu Sat Oct 14 20:47:04 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 14 Oct 2006 20:47:04 -0700 Subject: Comment stsetch SNF 2006-10-14 20:47:03: Wafer recovered Message-ID: From eenriquez at snf.stanford.edu Mon Oct 16 07:25:04 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Oct 2006 07:25:04 -0700 Subject: Problem stsetch SNF 2006-10-13 19:19:00: Wafer inside Message-ID: See previous comment about "no plasma" problem being caused by a high He leak rate. From eenriquez at snf.stanford.edu Mon Oct 16 07:25:21 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Oct 2006 07:25:21 -0700 Subject: Comment stsetch SNF 2006-10-13 21:50:12: Wafer unloaded, system ok (for now) Message-ID: Thanks. From eenriquez at snf.stanford.edu Mon Oct 16 07:25:31 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Oct 2006 07:25:31 -0700 Subject: Problem stsetch SNF 2006-10-14 17:49:38: wafer inside again Message-ID: See previous comment about "no plasma" problem being caused by a high He leak rate. From eenriquez at snf.stanford.edu Mon Oct 16 07:25:47 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Oct 2006 07:25:47 -0700 Subject: Comment stsetch SNF 2006-10-14 20:47:03: Wafer recovered Message-ID: Thanks again. From jprovine at snf.stanford.edu Wed Oct 18 19:08:14 2006 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 18 Oct 2006 19:08:14 -0700 Subject: Problem stsetch SNF 2006-10-18 19:08:14: aluminum ring stuck in chamber Message-ID: The aluminum holder's ring is stuck in the chamber under the lift arm. i got my wafer out, but the machine broke the wafer due to communication error...the load arm kept ramming past the end detector. machine is down until chamber can be vented and aluminum ring unstuck and removed. From eenriquez at snf.stanford.edu Thu Oct 19 09:20:13 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Oct 2006 09:20:13 -0700 Subject: Problem stsetch SNF 2006-10-18 19:08:14: aluminum ring stuck in chamber Message-ID: Vented chamber and removed stuck aluminum ring. Ran an O2 clean with and without the wafer carrier. Etcher ran with no problems. Machine log did not indicate any loss of communication errors. From yoonjin at snf.stanford.edu Mon Oct 23 16:59:39 2006 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Mon, 23 Oct 2006 16:59:39 -0700 Subject: Problem stsetch SNF 2006-10-23 16:59:39: missing holder Message-ID: I came here and found there was no holder metal ring. From eenriquez at snf.stanford.edu Tue Oct 24 07:16:39 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Oct 2006 07:16:39 -0700 Subject: Problem stsetch SNF 2006-10-23 16:59:39: missing holder Message-ID: Found missing holder. From latta at snf.stanford.edu Thu Oct 26 10:19:08 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 26 Oct 2006 10:19:08 -0700 Subject: Comment stsetch SNF 2006-10-09 14:01:28: no plasma, no etch Message-ID: see Elmer's comment of 10 Oct 2006 From latta at snf.stanford.edu Thu Oct 26 10:19:32 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 26 Oct 2006 10:19:32 -0700 Subject: Problem stsetch SNF 2006-10-09 14:02:30: no plasma, no etch Message-ID: See Elmer's comment of 10 Oct 06