Problem stsetch SNF 2006-10-01 13:49:25: locking up on almost every wafer

ericp at snf.stanford.edu ericp at snf.stanford.edu
Sun Oct 1 13:49:26 PDT 2006


It locked up again, this time in the middle of a 
run.  The unusual thing about 
this lockup is that the wafer chuck lowered out of the 
process position, even though it was supposedly 
in the middle of an etch.  
-Eric




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