Comment stsetch SNF 2006-10-01 12:56:17: KKUMAR's wafer is out- system up

eenriquez at eenriquez at
Mon Oct 2 11:24:46 PDT 2006

Ran several wafers using the deep recipe with no problems.  Changed the deep recipe time from 0 to 10 min.  We will continue to monitor the system.  According to the error log, the system lost communication with the process controller about 4 times last Sunday but it has been OK since then.

More information about the stsetch-pcs mailing list