Problem stsetch SNF 2006-10-01 05:01:24: Wafer in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Oct 2 11:25:05 PDT 2006


Ran several wafers using the deep recipe with no problems.  Changed the deep recipe time from 0 to 10 min.  We will continue to monitor the system.  According to the error log, the system lost communication with the process controller about 4 times last Sunday but it has been OK since then.




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