Problem stsetch SNF 2006-10-03 01:59:16: wafer stuck in chamber (again)

kkumar at snf.stanford.edu kkumar at snf.stanford.edu
Tue Oct 3 01:59:16 PDT 2006


lock excessive pump down time alarm. lock pressure will not go down below about 250mTorr. processed wafer still in chamber.




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