Problem stsetch SNF 2006-10-04 22:31:41: Grassing & then Not Processing

kkumar at snf.stanford.edu kkumar at snf.stanford.edu
Wed Oct 4 22:31:42 PDT 2006


1. On a 90micron etch of large features, standard DEEP recipe caused grass as tall as the etch. Holder was not used.
2. When I tried to etch the next wafer, it would not go beyond the pumpdown step. It hung at 00:00:00 at the pumpdown step. No alarm dialog popped up. It just froze there.




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