Problem stsetch SNF 2006-10-04 22:31:41: Grassing & then Not Processing

[kkumar at snf.stanford.edu]

1. On a 90micron etch of large features, standard DEEP recipe caused grass as tall as the etch. Holder was not used.
2. When I tried to etch the next wafer, it would not go beyond the pumpdown step. It hung at 00:00:00 at the pumpdown step. No alarm dialog popped up. It just froze there.