Problem stsetch SNF 2006-10-06 21:49:40: won't unload wafer

kkumar at snf.stanford.edu kkumar at snf.stanford.edu
Fri Oct 6 21:49:41 PDT 2006


stuck in unload step. however, no alarm dialog has popped up for the last 1/2 hr. processed wafer still in chamber.




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