Problem stsetch SNF 2006-10-06 21:49:40: won't unload wafer

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sun Oct 8 10:18:23 PDT 2006


System locked up, I had a hard time rebooting the tool.
Power down the tool a couple of time and finally initialize
ok. I manually removed the wafer inside the chamber.
 




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