Problem stsetch SNF 2006-10-09 12:21:48: no plasma, no etch
axiu at snf.stanford.edu
axiu at snf.stanford.edu
Mon Oct 9 12:21:49 PDT 2006
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Problem stsetch SNF 2006-10-06 21:49:40: won't unload wafer
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Problem stsetch SNF 2006-10-09 12:21:48: no plasma, no etch
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shows message " coil power out of tolerance ".
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Problem stsetch SNF 2006-10-06 21:49:40: won't unload wafer
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Problem stsetch SNF 2006-10-09 12:21:48: no plasma, no etch
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