Problem stsetch SNF 2006-10-09 14:02:30: no plasma, no etch
axiu at snf.stanford.edu
axiu at snf.stanford.edu
Mon Oct 9 14:02:31 PDT 2006
it happens when using Al holder with rubber ring. It shows "coil power out of tolerance."
More information about the stsetch-pcs
mailing list