Problem stsetch SNF 2006-10-13 19:19:00: Wafer inside

seoung at snf.stanford.edu seoung at snf.stanford.edu
Fri Oct 13 19:19:01 PDT 2006


5 minutes after I started a process, plasma disappeared. Then, I aborted the process. But I can not unload the wafer and it is still inside the chamber. I used the wafer holder.




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