Problem stsetch SNF 2006-10-14 17:49:38: wafer inside again

yoonjin at snf.stanford.edu yoonjin at snf.stanford.edu
Sat Oct 14 17:49:38 PDT 2006


20 minutes after I started a process, plasma disappeared. Then, I aborted the process. But I can not unload the wafer and it is still inside the chamber. I used the wafer holder. 




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