Problem stsetch SNF 2006-10-18 19:08:14: aluminum ring stuck in chamber

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Wed Oct 18 19:08:14 PDT 2006


The aluminum holder's ring is stuck in the chamber under the lift arm.  i got my wafer out, but the machine broke the wafer 
due to communication error...the load arm kept ramming past  the end detector.  machine is down until chamber can be vented and aluminum ring unstuck and removed.




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