Problem stsetch SNF 2006-10-18 19:08:14: aluminum ring stuck in chamber

jprovine at jprovine at
Wed Oct 18 19:08:14 PDT 2006

The aluminum holder's ring is stuck in the chamber under the lift arm.  i got my wafer out, but the machine broke the wafer 
due to communication error...the load arm kept ramming past  the end detector.  machine is down until chamber can be vented and aluminum ring unstuck and removed.

More information about the stsetch-pcs mailing list