Problem stsetch SNF 2006-10-18 19:08:14: aluminum ring stuck in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Oct 19 09:20:13 PDT 2006


Vented chamber and removed stuck aluminum ring.  Ran an O2 clean with and without the wafer carrier.  Etcher ran with no problems. 
Machine log did not indicate any loss of communication errors.




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