October 2006 Archives by date

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Starting: Sun Oct 1 05:01:24 PDT 2006
Ending: Thu Oct 26 10:19:32 PDT 2006
Messages: 40

Problem stsetch SNF 2006-10-01 05:01:24: Wafer in chamber kkumar at snf.stanford.edu
Comment stsetch SNF 2006-10-01 12:56:17: KKUMAR's wafer is out- system up ericp at snf.stanford.edu
Problem stsetch SNF 2006-10-01 13:49:25: locking up on almost every wafer ericp at snf.stanford.edu
Problem stsetch SNF 2006-10-01 13:49:25: locking up on almost every wafer eenriquez at snf.stanford.edu
Comment stsetch SNF 2006-10-01 12:56:17: KKUMAR's wafer is out- system up eenriquez at snf.stanford.edu
Problem stsetch SNF 2006-10-01 05:01:24: Wafer in chamber eenriquez at snf.stanford.edu
Problem stsetch SNF 2006-10-03 01:59:16: wafer stuck in chamber (again) kkumar at snf.stanford.edu
Problem stsetch SNF 2006-10-03 01:59:16: wafer stuck in chamber (again) eenriquez at snf.stanford.edu
Shutdown stsetch SNF 2006-10-03 08:55:22: 2 problems kkumar at snf.stanford.edu
Shutdown stsetch SNF 2006-10-03 08:55:22: 2 problems cbaxter at snf.stanford.edu
Shutdown stsetch SNF 2006-10-04 02:08:32: ICP serial communication failure alarm iwjung at snf.stanford.edu
Shutdown stsetch SNF 2006-10-04 02:08:32: ICP serial communication failure alarm cbaxter at snf.stanford.edu
Problem stsetch SNF 2006-10-04 22:31:41: Grassing & then Not Processing kkumar at snf.stanford.edu
Comment stsetch SNF 2006-10-04 22:58:22: Reg. grassing kkumar at snf.stanford.edu
Comment stsetch SNF 2006-10-04 22:58:22: Reg. grassing latta at snf.stanford.edu
Problem stsetch SNF 2006-10-04 22:31:41: Grassing & then Not Processing latta at snf.stanford.edu
Comment stsetch SNF 2006-09-20 17:44:39: Etcher is back in service. latta at snf.stanford.edu
Problem stsetch SNF 2006-10-06 21:49:40: won't unload wafer kkumar at snf.stanford.edu
Problem stsetch SNF 2006-10-06 21:49:40: won't unload wafer cbaxter at snf.stanford.edu
Problem stsetch SNF 2006-10-09 12:21:48: no plasma, no etch axiu at snf.stanford.edu
Problem stsetch SNF 2006-10-09 12:21:48: no plasma, no etch cbaxter at snf.stanford.edu
Comment stsetch SNF 2006-10-09 14:01:28: no plasma, no etch axiu at snf.stanford.edu
Problem stsetch SNF 2006-10-09 14:02:30: no plasma, no etch axiu at snf.stanford.edu
Comment stsetch SNF 2006-10-10 07:35:23: no plasma caused by hi He leak rate eenriquez at snf.stanford.edu
Problem stsetch SNF 2006-10-10 15:56:20: coil power out of tolerance axiu at snf.stanford.edu
Problem stsetch SNF 2006-10-10 15:56:20: coil power out of tolerance cbaxter at snf.stanford.edu
Problem stsetch SNF 2006-10-13 19:19:00: Wafer inside seoung at snf.stanford.edu
Comment stsetch SNF 2006-10-13 21:50:12: Wafer unloaded, system ok (for now) ericp at snf.stanford.edu
Problem stsetch SNF 2006-10-14 17:49:38: wafer inside again yoonjin at snf.stanford.edu
Comment stsetch SNF 2006-10-14 20:47:03: Wafer recovered ericp at snf.stanford.edu
Problem stsetch SNF 2006-10-13 19:19:00: Wafer inside eenriquez at snf.stanford.edu
Comment stsetch SNF 2006-10-13 21:50:12: Wafer unloaded, system ok (for now) eenriquez at snf.stanford.edu
Problem stsetch SNF 2006-10-14 17:49:38: wafer inside again eenriquez at snf.stanford.edu
Comment stsetch SNF 2006-10-14 20:47:03: Wafer recovered eenriquez at snf.stanford.edu
Problem stsetch SNF 2006-10-18 19:08:14: aluminum ring stuck in chamber jprovine at snf.stanford.edu
Problem stsetch SNF 2006-10-18 19:08:14: aluminum ring stuck in chamber eenriquez at snf.stanford.edu
Problem stsetch SNF 2006-10-23 16:59:39: missing holder yoonjin at snf.stanford.edu
Problem stsetch SNF 2006-10-23 16:59:39: missing holder eenriquez at snf.stanford.edu
Comment stsetch SNF 2006-10-09 14:01:28: no plasma, no etch latta at snf.stanford.edu
Problem stsetch SNF 2006-10-09 14:02:30: no plasma, no etch latta at snf.stanford.edu

Last message date: Thu Oct 26 10:19:32 PDT 2006
Archived on: Fri Jan 11 13:11:17 PST 2013

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