From latta at snf.stanford.edu Tue Sep 19 18:23:30 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 19 Sep 2006 18:23:30 -0700 Subject: Problem stsetch SNF 2006-09-19 18:23:30: Process qual good, but.... Message-ID: I ran a seasoning wafer after the test and twice it kicked out (at about 5 mins into the run) for a compressed air fault. Etch rate looks good, about 2.1um/min. I wasn't able to get the resist readings on our measurement tools. From eenriquez at snf.stanford.edu Wed Sep 20 10:09:52 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Sep 2006 10:09:52 -0700 Subject: Shutdown stsetch SNF 2006-07-01 01:13:42: comm error Message-ID: The root cause of the problem was a defective power supply which caused the load lock controller to periodically reset. This bogged down the communication lines which resulted in the erratic behavior of the whole system. In the process of troubleshooting, we have replaced the load lock controller, high vacuum controller, load lock motor and a power supply module. From eenriquez at snf.stanford.edu Wed Sep 20 10:10:08 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Sep 2006 10:10:08 -0700 Subject: Comment stsetch SNF 2006-07-24 14:23:57: Update status Message-ID: From eenriquez at snf.stanford.edu Wed Sep 20 10:10:14 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Sep 2006 10:10:14 -0700 Subject: Comment stsetch SNF 2006-07-31 14:44:32: Update Message-ID: From eenriquez at snf.stanford.edu Wed Sep 20 10:10:21 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Sep 2006 10:10:21 -0700 Subject: Comment stsetch SNF 2006-08-09 17:06:54: update. Message-ID: From eenriquez at snf.stanford.edu Wed Sep 20 10:10:28 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Sep 2006 10:10:28 -0700 Subject: Comment stsetch SNF 2006-08-17 17:55:10: Update 8/17/06 Message-ID: From eenriquez at snf.stanford.edu Wed Sep 20 10:12:16 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Sep 2006 10:12:16 -0700 Subject: Comment stsetch SNF 2006-09-20 10:12:15: System under test Message-ID: We are currently cycling the system to ensure its reliability. If all goes well, it should be up by 6 PM tonight. From latta at snf.stanford.edu Wed Sep 20 16:18:45 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 20 Sep 2006 16:18:45 -0700 Subject: Shutdown stsetch SNF 2006-09-20 16:18:44: Appears to have too much polymer- testing Message-ID: From latta at snf.stanford.edu Wed Sep 20 17:41:20 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 20 Sep 2006 17:41:20 -0700 Subject: Shutdown stsetch SNF 2006-09-20 16:18:44: Appears to have too much polymer- testing Message-ID: Ran DEEP program for 00:30:00- etch rate about 2um/min and etch looks good- no blue color. From latta at snf.stanford.edu Wed Sep 20 17:42:10 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 20 Sep 2006 17:42:10 -0700 Subject: Comment stsetch SNF 2006-09-20 10:12:15: System under test Message-ID: Tested with both long and short etches. Looks good for DEEP program. From latta at snf.stanford.edu Wed Sep 20 17:43:18 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 20 Sep 2006 17:43:18 -0700 Subject: Problem stsetch SNF 2006-09-19 18:23:30: Process qual good, but.... Message-ID: Ran 9 runs without problem re-occuring. Set to go. From latta at snf.stanford.edu Wed Sep 20 17:44:40 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 20 Sep 2006 17:44:40 -0700 Subject: Comment stsetch SNF 2006-09-20 17:44:39: Etcher is back in service. Message-ID: Deep recipe tested. Make sure to check your recipes. And please report any problems with the tool. Happy Etching! From xzhuan1 at snf.stanford.edu Thu Sep 21 21:00:31 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 21 Sep 2006 21:00:31 -0700 Subject: Shutdown stsetch SNF 2006-09-21 21:00:31: coil power out of tolerance Message-ID: etch wouldn't start From eenriquez at snf.stanford.edu Fri Sep 22 07:47:34 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Sep 2006 07:47:34 -0700 Subject: Shutdown stsetch SNF 2006-09-21 21:00:31: coil power out of tolerance Message-ID: No problem found. The deep recipe with and without the carrier ran with no problems. From gzxqfy at 11.com Sat Sep 23 14:48:51 2006 From: gzxqfy at 11.com (New Bridge Translation Expert) Date: Sun, 24 Sep 2006 05:48:51 +0800 Subject: =?GB2312?B?0MLHxdGnyvW3rdLru/q5uQ==?= Message-ID: An HTML attachment was scrubbed... URL: