Problem stsetch SNF 2006-09-19 18:23:30: Process qual good, but....

latta at latta at
Tue Sep 19 18:23:30 PDT 2006

I ran a seasoning wafer after the test and twice it kicked out (at about 5 mins into the run) for a compressed air fault.
Etch rate looks good, about 2.1um/min.  I wasn't able to get the resist readings on our measurement tools.

More information about the stsetch-pcs mailing list