Problem stsetch SNF 2006-09-19 18:23:30: Process qual good, but....

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Sep 19 18:23:30 PDT 2006


I ran a seasoning wafer after the test and twice it kicked out (at about 5 mins into the run) for a compressed air fault.
Etch rate looks good, about 2.1um/min.  I wasn't able to get the resist readings on our measurement tools.




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