Shutdown stsetch SNF 2006-09-20 16:18:44: Appears to have too much polymer- testing

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Sep 20 17:41:20 PDT 2006


Ran DEEP program for 00:30:00- etch rate about 2um/min and etch looks good- no blue color.




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