From jasmine at snf.stanford.edu Sat Aug 4 19:17:27 2007 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Sat, 4 Aug 2007 19:17:27 -0700 Subject: Shutdown stsetch SNF 2007-08-04 19:17:26: wafer broke in teh chamber Message-ID: The wafer loaded well but the steps prior to the plasma coming on caused the wafer to break. From cbaxter at snf.stanford.edu Mon Aug 6 09:00:07 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Aug 2007 09:00:07 -0700 Subject: Shutdown stsetch SNF 2007-08-04 19:17:26: wafer broke in teh chamber Message-ID: Vented chamber and cleaned up broken wafer. Run o2 plasma. From fungus at snf.stanford.edu Mon Aug 6 21:11:43 2007 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Mon, 6 Aug 2007 21:11:43 -0700 Subject: Problem stsetch SNF 2007-08-06 21:11:43: Pieces of broken wafer in load zone Message-ID: When I was about to use STS I saw there was a broken wafer beside the chamber on a cleannapkin. Upon further inspection I can see there are pieces of broken wafer inside of the loading zone. I don't know where or who is responsible. From cbaxter at snf.stanford.edu Tue Aug 7 10:23:03 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 7 Aug 2007 10:23:03 -0700 Subject: Problem stsetch SNF 2007-08-06 21:11:43: Pieces of broken wafer in load zone Message-ID: System is ok to us, broken wafer on l/l is been removed. From jprovine at snf.stanford.edu Tue Aug 7 16:59:50 2007 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 7 Aug 2007 16:59:50 -0700 Subject: Problem stsetch SNF 2007-08-07 16:59:50: wafer broken in chamber Message-ID: wafer broken in chamber. i put a wafer tray with my name on it on the tool. please save the pieces for me in there. From cbaxter at snf.stanford.edu Wed Aug 8 08:38:53 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Aug 2007 08:38:53 -0700 Subject: Problem stsetch SNF 2007-08-07 16:59:50: wafer broken in chamber Message-ID: The broken of wafer was to thin already to being with, user should use carrier when etching thin wafer. From mtang at snf.stanford.edu Wed Aug 8 09:39:42 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 8 Aug 2007 09:39:42 -0700 Subject: Comment stsetch SNF 2007-08-08 09:39:41: Reports of wafer breakage Message-ID: Cesar ran a number of wafers to check handling and found no problems - handler runs smoothly. Nancy notes that most of the wafer breakages occur with one user, who is known to have a somewhat vulnerable etch pattern. For future reports of breakage, it would be helpful to know how many similar wafers were processed, the thickness of the wafers, and etch depth. Thanks From mislam at snf.stanford.edu Sat Aug 18 19:19:03 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 18 Aug 2007 19:19:03 -0700 Subject: Problem stsetch SNF 2007-08-18 19:19:01: no C4F8 flow, plasma amber red Message-ID: Etched wafer came out looking bad From eenriquez at snf.stanford.edu Mon Aug 20 08:59:48 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:59:48 -0700 Subject: Comment stsetch SNF 2007-08-20 08:59:47: Update Message-ID: Need new C4F8 cylinder From eenriquez at snf.stanford.edu Tue Aug 21 14:48:59 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:48:59 -0700 Subject: Problem stsetch SNF 2007-08-18 19:19:01: no C4F8 flow, plasma amber red Message-ID: New C4F8 cylinder has been installed. Ran process for 5 minutes with no problems. Plasma color is now blue. From eenriquez at snf.stanford.edu Tue Aug 21 14:49:10 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:49:10 -0700 Subject: Comment stsetch SNF 2007-08-20 08:59:47: Update Message-ID: New C4F8 cylinder has been installed. Ran process for 5 minutes with no problems. Plasma color is now blue. From eenriquez at snf.stanford.edu Tue Aug 21 14:56:46 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:56:46 -0700 Subject: Problem stsetch SNF 2007-08-21 14:56:45: Needs qual Message-ID: Nancy will run a qual around 4 pm. From latta at snf.stanford.edu Tue Aug 21 16:05:10 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Aug 2007 16:05:10 -0700 Subject: Problem stsetch SNF 2007-08-21 14:56:45: Needs qual Message-ID: Qual run after C4F8 change out. It came out very close to Aug process qual. Good to go. From barlian at snf.stanford.edu Wed Aug 29 01:16:23 2007 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Wed, 29 Aug 2007 01:16:23 -0700 Subject: Problem stsetch SNF 2007-08-29 01:16:21: grass Message-ID: I used "smooshall" recipe, etched silicon for about 14 minutes, and it resulted in grass