Problem stsetch SNF 2007-08-06 21:11:43: Pieces of broken wafer in load zone

fungus at snf.stanford.edu fungus at snf.stanford.edu
Mon Aug 6 21:11:43 PDT 2007


When I was about to use STS I saw there was a broken wafer beside the chamber on a cleannapkin.  Upon further inspection I can see there are pieces of broken wafer inside of the loading zone.  I don't know where or who is responsible.  




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