Problem stsetch SNF 2007-08-07 16:59:50: wafer broken in chamber

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Tue Aug 7 16:59:50 PDT 2007

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wafer broken in chamber.  i put a wafer tray with my name on it on the tool.  please save the pieces for me in there.

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