Problem stsetch SNF 2007-08-07 16:59:50: wafer broken in chamber
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Wed Aug 8 08:38:53 PDT 2007
The broken of wafer was to thin already to being with,
user should use carrier when etching thin wafer.
More information about the stsetch-pcs
mailing list