Comment stsetch SNF 2007-08-08 09:39:41: Reports of wafer breakage

mtang at snf.stanford.edu mtang at snf.stanford.edu
Wed Aug 8 09:39:42 PDT 2007


Cesar ran a number of wafers to check handling and found no problems - handler runs smoothly.  Nancy notes that most of the wafer breakages occur with one user, who is known to have a somewhat vulnerable etch pattern.  For future reports of breakage, it would be helpful to know how many similar wafers were processed, the thickness of the wafers, and etch depth.
Thanks




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