Problem stsetch SNF 2007-08-18 19:19:01: no C4F8 flow, plasma amber red

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Aug 21 14:48:59 PDT 2007


New C4F8 cylinder has been installed.  Ran process for 5 minutes with no problems.  Plasma color is now blue.  




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