Problem stsetch SNF 2007-12-13 17:13:19: "Power out of tolerance"

mcherry at snf.stanford.edu mcherry at snf.stanford.edu
Thu Dec 13 17:13:19 PST 2007


Worked fine for a few hours, but with 2 minutes left in the process the lights inside the chamber went off.  "ICP holding process... while coil power out of tolerance."  Tried reloading the wafer several times (usually solves this error) but with no luck.  Also got similar message for Platen power when reloading.
Was running DEEP process.




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