From mtan at snf.stanford.edu Mon Feb 5 12:26:58 2007 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 5 Feb 2007 12:26:58 -0800 Subject: Problem stsetch SNF 2007-02-05 12:26:57: coil power out of tolerance Message-ID: result: the etching process won't start. From eenriquez at snf.stanford.edu Mon Feb 5 14:41:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Feb 2007 14:41:00 -0800 Subject: Problem stsetch SNF 2007-02-05 12:26:57: coil power out of tolerance Message-ID: Ran a wafer two wafers with no problems. One with carrier and the other without. Helium backside pressure should be around 9.2 T. If the pressure is less than 7 T, unload the wafer and reposition it before re-running the process. From mtan at snf.stanford.edu Mon Feb 5 17:54:01 2007 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 5 Feb 2007 17:54:01 -0800 Subject: Problem stsetch SNF 2007-02-05 17:54:01: ICP transfer failure communication lost Message-ID: Wafer is still in the chamber. If anyone is able to take the wafer out please leave it in the empty wafer case. Thank you. From mtan at snf.stanford.edu Mon Feb 5 17:55:21 2007 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 5 Feb 2007 17:55:21 -0800 Subject: Shutdown stsetch SNF 2007-02-05 17:55:21: ICP transfer failure Message-ID: From eenriquez at snf.stanford.edu Tue Feb 6 08:56:37 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Feb 2007 08:56:37 -0800 Subject: Shutdown stsetch SNF 2007-02-05 17:55:21: ICP transfer failure Message-ID: Reset the computer. Cycled wafers using O2 clean recipe with no problems. We will install a UPS for the computer to see if this will help the lock-up problem. From eenriquez at snf.stanford.edu Tue Feb 6 08:56:49 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Feb 2007 08:56:49 -0800 Subject: Problem stsetch SNF 2007-02-05 17:54:01: ICP transfer failure communication lost Message-ID: Reset the computer. Cycled wafers using O2 clean recipe with no problems. We will install a UPS for the computer to see if this will help the lock-up problem. From mtan at snf.stanford.edu Tue Feb 6 16:42:00 2007 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 6 Feb 2007 16:42:00 -0800 Subject: Shutdown stsetch SNF 2007-02-06 16:41:59: lock not available alarm Message-ID: load tray doesn't work and the wafer is still inside the chamber. From latta at snf.stanford.edu Tue Feb 6 16:53:41 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 6 Feb 2007 16:53:41 -0800 Subject: Shutdown stsetch SNF 2007-02-06 16:41:59: lock not available alarm Message-ID: Eric is taking a look .... From caudillo at snf.stanford.edu Wed Feb 14 12:06:19 2007 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Wed, 14 Feb 2007 12:06:19 -0800 Subject: Problem stsetch SNF 2007-02-14 12:06:19: compressed-air fault Alarm Message-ID: compressed air fault alarm. My wafer is inside chamber-looks intack. happened during etch cycle about last 40 minutes of an hour and 29 min etch. From cbaxter at snf.stanford.edu Wed Feb 14 14:01:23 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Feb 2007 14:01:23 -0800 Subject: Comment stsetch SNF 2007-01-24 09:23:15: Changed wafer carrier and tested w/out problem. Message-ID: From cbaxter at snf.stanford.edu Wed Feb 14 14:01:32 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Feb 2007 14:01:32 -0800 Subject: Comment stsetch SNF 2006-12-15 17:24:39: Works OK now Message-ID: From cbaxter at snf.stanford.edu Wed Feb 14 14:04:58 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Feb 2007 14:04:58 -0800 Subject: Problem stsetch SNF 2007-02-14 12:06:19: compressed-air fault Alarm Message-ID: Reset system and cleared error From jprovine at snf.stanford.edu Fri Feb 16 06:26:51 2007 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 16 Feb 2007 06:26:51 -0800 Subject: Problem stsetch SNF 2007-02-16 06:26:51: arm time out Message-ID: arm motion time out on unload. wafer stuck in load lock. please put the wafer in the box i've left on the machine. From eenriquez at snf.stanford.edu Fri Feb 16 08:57:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Feb 2007 08:57:00 -0800 Subject: Shutdown stsetch SNF 2007-02-16 08:56:59: Load arm motor does not stop Message-ID: Load arm motor keeps driving even when the arm is in the home position. From eenriquez at snf.stanford.edu Fri Feb 16 11:16:17 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Feb 2007 11:16:17 -0800 Subject: Shutdown stsetch SNF 2007-02-16 08:56:59: Load arm motor does not stop Message-ID: Found the screw that secured the lead screw drive assembly was loose. Retightened the screw. Also cleaned and re-lubricated the assembly. Ran O2 clean. From eenriquez at snf.stanford.edu Fri Feb 16 11:16:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Feb 2007 11:16:40 -0800 Subject: Problem stsetch SNF 2007-02-16 06:26:51: arm time out Message-ID: Found the screw that secured the lead screw drive assembly was loose. Retightened the screw. Also cleaned and re-lubricated the assembly. Ran O2 clean. From nag at snf.stanford.edu Fri Feb 23 12:06:00 2007 From: nag at snf.stanford.edu (nag at snf.stanford.edu) Date: Fri, 23 Feb 2007 12:06:00 -0800 Subject: Comment stsetch SNF 2007-02-23 12:06:00: Etch results Message-ID: The etched wafers have been coming out with a brown dusty haze over most of the area. This is for a recipe where the main step is the standard DEEP step using SF6 and C4F8. This was noticed on a wafer run last night and I understand that the same result was seen on a 2nd wafer run today. All process parameters read OK during process. Is there an idea of what the root-cause might be and how we fix it. Btw, we have run several wafers with the same recipe in the last few days with good results From bchui at snf.stanford.edu Wed Feb 28 18:09:24 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 28 Feb 2007 18:09:24 -0800 Subject: Problem stsetch SNF 2007-02-28 18:09:23: software glitch Message-ID: Needs GUI reset and restart before my processed wafer can be unloaded from the etch chamber. From eenriquez at snf.stanford.edu Wed Feb 28 19:16:25 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Feb 2007 19:16:25 -0800 Subject: Problem stsetch SNF 2007-02-28 18:09:23: software glitch Message-ID: Reset the system. Unloaded the user's wafer.