Problem stsetch SNF 2007-02-05 12:26:57: coil power out of tolerance

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Feb 5 14:41:00 PST 2007


Ran a wafer two wafers with no problems.  One with carrier and the other without.  Helium backside pressure should be around 9.2 T.  If the pressure is less than 7 T, unload the wafer and reposition it before re-running the process.




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