Problem stsetch SNF 2007-02-05 17:54:01: ICP transfer failure communication lost

eenriquez at eenriquez at
Tue Feb 6 08:56:49 PST 2007

Reset the computer.  Cycled wafers using O2 clean recipe with no problems.  We will install a UPS for the computer to see if this will help the lock-up problem.

More information about the stsetch-pcs mailing list