Problem stsetch SNF 2007-02-05 17:54:01: ICP transfer failure communication lost

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Feb 6 08:56:49 PST 2007


Reset the computer.  Cycled wafers using O2 clean recipe with no problems.  We will install a UPS for the computer to see if this will help the lock-up problem.




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