Problem stsetch SNF 2007-02-05 17:54:01: ICP transfer failure communication lost
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Feb 6 08:56:49 PST 2007
Reset the computer. Cycled wafers using O2 clean recipe with no problems. We will install a UPS for the computer to see if this will help the lock-up problem.
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