Problem stsetch SNF 2007-02-14 12:06:19: compressed-air fault Alarm

caudillo at snf.stanford.edu caudillo at snf.stanford.edu
Wed Feb 14 12:06:19 PST 2007


compressed air fault alarm. My wafer is inside chamber-looks intack. happened during etch cycle about last 40 minutes of an hour and 29 min etch.




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