Problem stsetch SNF 2007-02-14 12:06:19: compressed-air fault Alarm

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Feb 14 14:04:58 PST 2007

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Reset system and cleared error

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Next message: Comment stsetch SNF 2007-01-24 09:23:15: Changed wafer carrier and tested w/out problem.
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