Problem stsetch SNF 2007-02-28 18:09:23: software glitch

bchui at snf.stanford.edu bchui at snf.stanford.edu
Wed Feb 28 18:09:24 PST 2007

Previous message: Comment stsetch SNF 2007-02-23 12:06:00: Etch results
Next message: Problem stsetch SNF 2007-02-28 18:09:23: software glitch
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Needs GUI reset and restart before my processed wafer can be unloaded from the etch chamber.

Previous message: Comment stsetch SNF 2007-02-23 12:06:00: Etch results
Next message: Problem stsetch SNF 2007-02-28 18:09:23: software glitch
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list