Problem stsetch SNF 2007-01-24 20:45:44: coil / low pwr when using the holder

jackson at snf.stanford.edu jackson at snf.stanford.edu
Wed Jan 24 20:45:44 PST 2007

Previous message: Comment stsetch SNF 2007-01-24 09:23:15: Changed wafer carrier and tested w/out problem.
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running "Deep" program using wfr holder having problems igniting plasma...coil and pwr errors

Previous message: Comment stsetch SNF 2007-01-24 09:23:15: Changed wafer carrier and tested w/out problem.
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