Shutdown stsetch SNF 2007-01-25 17:43:34: wfr broken inside etch chamber

jackson at snf.stanford.edu jackson at snf.stanford.edu
Thu Jan 25 17:43:35 PST 2007


previous user's wfr broken inside chamber...message read coil problem.   User had left message to unload wfr but still had 23 min., on timer and coil error and wfr broke.




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