From cbaxter at snf.stanford.edu Tue Jul 3 13:38:50 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Jul 2007 13:38:50 -0700 Subject: Shutdown stsetch SNF 2007-06-25 00:52:20: foreline pump not pumping Message-ID: Installed newly rebuild pump package, chamber base @ 4.0 e-4. Run 20 minutes o2 plasma w/out problem. From cbaxter at snf.stanford.edu Tue Jul 3 13:38:56 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Jul 2007 13:38:56 -0700 Subject: Problem stsetch SNF 2007-06-23 18:43:39: A few minor problems: Message-ID: From cbaxter at snf.stanford.edu Tue Jul 3 13:39:04 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Jul 2007 13:39:04 -0700 Subject: Problem stsetch SNF 2007-06-22 15:59:24: Breaking Wafers Message-ID: From mtang at snf.stanford.edu Thu Jul 5 09:11:45 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 5 Jul 2007 09:11:45 -0700 Subject: Comment stsetch SNF 2007-06-28 08:13:27: Dry Pump Update Message-ID: Ever vigilant crack maintenance crew found there was no oil in the blower (in all fairness, it was not tagged as such by the repair vendor as it is supposed to be.) From sanjah at snf.stanford.edu Sat Jul 7 10:36:45 2007 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Sat, 7 Jul 2007 10:36:45 -0700 Subject: Problem stsetch SNF 2007-07-07 10:36:44: no plasma Message-ID: error: coil power out of tolerance From jasmine at snf.stanford.edu Sat Jul 7 12:34:39 2007 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Sat, 7 Jul 2007 12:34:39 -0700 Subject: Problem stsetch SNF 2007-07-07 12:34:38: sts pressure was too high..but fixed NOW Message-ID: From ericp at snf.stanford.edu Sat Jul 7 19:50:05 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 7 Jul 2007 19:50:05 -0700 Subject: Problem stsetch SNF 2007-07-07 19:50:05: He Leakage Message-ID: The He leaks on normal wafers, causing the plasma not to strike. This leads to the problem of uninformed people TURNING DOWN THE He TO MAKE IT WORK, which ruins other people's wafers. From ericp at snf.stanford.edu Sat Jul 7 19:55:47 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 7 Jul 2007 19:55:47 -0700 Subject: Problem stsetch SNF 2007-07-07 19:55:45: Screws still not covered by plastic Message-ID: The screw heads are still exposed inside the chamber, which means that there is still probably iron contamination. From eenriquez at snf.stanford.edu Tue Jul 10 08:17:45 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jul 2007 08:17:45 -0700 Subject: Comment stsetch SNF 2007-07-10 08:17:43: Screw caps has been ordered Message-ID: From eenriquez at snf.stanford.edu Thu Jul 12 09:01:59 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2007 09:01:59 -0700 Subject: Problem stsetch SNF 2007-07-07 19:55:45: Screws still not covered by plastic Message-ID: Installed teflon screw covers. Ran O2 clean. From eenriquez at snf.stanford.edu Thu Jul 12 09:02:25 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Jul 2007 09:02:25 -0700 Subject: Comment stsetch SNF 2007-07-10 08:17:43: Screw caps has been ordered Message-ID: Installed teflon screw covers. Ran O2 clean. From cbaxter at snf.stanford.edu Thu Jul 12 14:32:52 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Jul 2007 14:32:52 -0700 Subject: Problem stsetch SNF 2007-07-07 19:50:05: He Leakage Message-ID: From cbaxter at snf.stanford.edu Thu Jul 12 14:33:02 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Jul 2007 14:33:02 -0700 Subject: Problem stsetch SNF 2007-07-07 12:34:38: sts pressure was too high..but fixed NOW Message-ID: From cbaxter at snf.stanford.edu Thu Jul 12 14:33:07 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 12 Jul 2007 14:33:07 -0700 Subject: Problem stsetch SNF 2007-07-07 10:36:44: no plasma Message-ID: From huangzb at snf.stanford.edu Sat Jul 28 11:17:12 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 28 Jul 2007 11:17:12 -0700 Subject: Problem stsetch SNF 2007-07-28 11:17:12: program abort Message-ID: The program encountered some error and exited by itself. Restart the program but do not know the password for the graphical control interface. From eenriquez at snf.stanford.edu Mon Jul 30 08:58:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Jul 2007 08:58:04 -0700 Subject: Comment stsetch SNF 2007-06-23 18:41:23: Broken wafer cleared Message-ID: Thanks. From eenriquez at snf.stanford.edu Mon Jul 30 09:00:43 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Jul 2007 09:00:43 -0700 Subject: Problem stsetch SNF 2007-07-28 11:17:12: program abort Message-ID: Program was already in the user interface screen. Ran O2 recipe with no problems.