Problem stsetch SNF 2007-06-03 00:59:03: ICP errors and no plasma

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sun Jun 3 00:59:03 PDT 2007


after running a wafer successfully, i kept getting ICP out of range errors and no plasma generation.  same result for multiple wafers (even blanks) and multiple recipes.




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