Shutdown stsetch SNF 2007-06-05 10:27:43: wafer broken in the chamber
aeonia at snf.stanford.edu
aeonia at snf.stanford.edu
Tue Jun 5 10:27:43 PDT 2007
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Problem stsetch SNF 2007-06-03 12:02:35: He flow high and unstable
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Shutdown stsetch SNF 2007-06-05 10:27:43: wafer broken in the chamber
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Shutdown stsetch SNF 2007-06-05 10:27:43: wafer broken in the chamber
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