Shutdown stsetch SNF 2007-06-22 10:06:50: broken wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Jun 22 11:37:13 PDT 2007
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Shutdown stsetch SNF 2007-06-22 10:06:50: broken wafer
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Problem stsetch SNF 2007-06-22 15:59:24: Breaking Wafers
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Cleaned chamber and platen. Ran O2 clean.
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Shutdown stsetch SNF 2007-06-22 10:06:50: broken wafer
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Problem stsetch SNF 2007-06-22 15:59:24: Breaking Wafers
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