Problem stsetch SNF 2007-06-22 15:59:24: Breaking Wafers

emyers at emyers at
Fri Jun 22 15:59:25 PDT 2007

USE AT YOUR OWN RISK.  The system has broken 3 wafers today, Friday.  I don't know about the last wafer, but the prior wafers were getting some sort of deposition on the backside.  This seemed to cause the wafer to stick to the chuck.  Nothing was obvious after the multiple cleanings.  The safe approach would be to put the system down, but many will want to use the system over the weekend.  USE AT YOUR OWN RISK

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