Shutdown stsetch SNF 2007-06-25 00:52:20: foreline pump not pumping

ericp at snf.stanford.edu ericp at snf.stanford.edu
Mon Jun 25 00:52:21 PDT 2007


Ran fine for several of Jasmine's wafers, then 
on a long run, failed about 1 hour in with "overpressure"
error.  It appears the the foreline pump cannot 
handle the load, and the pressure in the foreline 
rises to >1T.  Turbo errored out on E0006. I turned 
the turbo off. 




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