From joongsun at snf.stanford.edu Thu Mar 8 01:48:32 2007 From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu) Date: Thu, 8 Mar 2007 01:48:32 -0800 Subject: Problem stsetch SNF 2007-03-08 01:48:32: Coil power error if holder used Message-ID: It was okay if holder is not used but whenever I use holder not to break wafer, coil power was out of tolerance. Maybe some problem of holder ( I found holer is not flat) From cbaxter at snf.stanford.edu Thu Mar 8 10:13:20 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 8 Mar 2007 10:13:20 -0800 Subject: Problem stsetch SNF 2007-03-08 01:48:32: Coil power error if holder used Message-ID: Vented chamber and cleaned he lip seal. From ericp at snf.stanford.edu Thu Mar 8 18:42:20 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 8 Mar 2007 18:42:20 -0800 Subject: Shutdown stsetch SNF 2007-03-08 18:42:16: Turbo dump !? Message-ID: It looks like STS just dumped the turbo (not crashed, but it did "whine" down). It was NOT running a process, and noone was using it. It threw up an error" Lock not available, Serial comm failure". The turbo controller is "off" (no display) despite the "on" button being depressed (so I suspect the controller shut itself down). From eenriquez at snf.stanford.edu Fri Mar 9 14:50:11 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Mar 2007 14:50:11 -0800 Subject: Comment stsetch SNF 2007-03-09 14:50:10: System intermittently loosing communication Message-ID: System loosing communication we believe might be caused by a bad power disconnect switch. Still need to troubleshoot From eenriquez at snf.stanford.edu Mon Mar 12 14:42:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2007 14:42:40 -0700 Subject: Comment stsetch SNF 2007-03-09 14:50:10: System intermittently loosing communication Message-ID: From eenriquez at snf.stanford.edu Mon Mar 12 14:43:14 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Mar 2007 14:43:14 -0700 Subject: Comment stsetch SNF 2007-03-12 14:43:13: Update Message-ID: Found what we believe to be the root cause of frequent system lock-up. The systems DC power supply's cooling fan was failing which caused the supply to overheat and eventually shut-off. Replaced the fan and monitored the system for over 3.5 hours. System did not lock-up. Still have one minor problem. The system errored for no platten power when I tried to run an O2 clean. Water flow checked OK. Need to check water resistivity. Also need to check backside He. From eenriquez at snf.stanford.edu Tue Mar 13 10:08:16 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Mar 2007 10:08:16 -0700 Subject: Shutdown stsetch SNF 2007-03-08 18:42:16: Turbo dump !? Message-ID: Replaced the system power supply's fan. From eenriquez at snf.stanford.edu Tue Mar 13 10:14:09 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Mar 2007 10:14:09 -0700 Subject: Comment stsetch SNF 2007-03-12 14:43:13: Update Message-ID: The platen rf power was not turning on. Re-seated the control cables. Ran test with no problems. Noticed that most of the recipes have a 99% tolerance setting for the platen power. If the platen power is critical to your process, suggest changing this setting. From mislam at snf.stanford.edu Tue Mar 13 15:30:20 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 13 Mar 2007 15:30:20 -0700 Subject: Shutdown stsetch SNF 2007-03-13 15:30:19: Wafer broke in the chamber Message-ID: Wafer broke after loading in the chamber. Broke into 2 piece. This is a whole wafer, no etch was done. From cbaxter at snf.stanford.edu Wed Mar 14 08:47:40 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Mar 2007 08:47:40 -0700 Subject: Shutdown stsetch SNF 2007-03-13 15:30:19: Wafer broke in the chamber Message-ID: Vented chamber and removed half of the broken wafer. Run 10mins o2 clean. From kupnik at snf.stanford.edu Fri Mar 23 01:33:30 2007 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Fri, 23 Mar 2007 01:33:30 -0700 Subject: Problem stsetch SNF 2007-03-23 01:33:29: helium flow problem Message-ID: helium gas flow low, resist burning. We etched 3 hours, then another 20 min. After the first etch everything was fine. During the second it gave a error message and we saw a lot of resist burning From cbaxter at snf.stanford.edu Fri Mar 23 08:48:01 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 23 Mar 2007 08:48:01 -0700 Subject: Problem stsetch SNF 2007-03-23 01:33:29: helium flow problem Message-ID: vented chamber and cleaned lip seal oring for b/s he. From jprovine at snf.stanford.edu Fri Mar 23 09:38:39 2007 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 23 Mar 2007 09:38:39 -0700 Subject: Problem stsetch SNF 2007-03-23 09:38:39: He cooling flow and pressure setpoints changed Message-ID: The He pressure (normally 9.8 now 6.5) and flow (normally 2.9 now 1.6) had been changed when i came to the tool this morning. I was running recipe DEEP. plasma struck and was steady with no alarms for temperature tolerance or other problems. i ran a dummy for 10 minutes. the etch performance looks roughly ok (optical microscope inspection), but i'm wary of running my process wafers until i know why the cooling set points are off/different. NOTE: no visible problems with my dummy wafer but process at your own risk. From cbaxter at snf.stanford.edu Fri Mar 23 11:50:16 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 23 Mar 2007 11:50:16 -0700 Subject: Problem stsetch SNF 2007-03-23 09:38:39: He cooling flow and pressure setpoints changed Message-ID: I ran o2 plasma with he setting at 9.5 w/out probem. From jasmine at snf.stanford.edu Mon Mar 26 16:32:53 2007 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Mon, 26 Mar 2007 16:32:53 -0700 Subject: Shutdown stsetch SNF 2007-03-26 16:32:52: broken wafer in the chamber Message-ID: Broken wafer in the chamber! From maurice at snf.stanford.edu Mon Mar 26 16:35:27 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Mar 2007 16:35:27 -0700 Subject: Shutdown stsetch SNF 2007-03-26 16:32:52: broken wafer in the chamber Message-ID: From jasmine at snf.stanford.edu Mon Mar 26 16:36:09 2007 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Mon, 26 Mar 2007 16:36:09 -0700 Subject: Problem stsetch SNF 2007-03-26 16:36:08: Broken wafer in the chamber Message-ID: From ericp at snf.stanford.edu Mon Mar 26 22:44:20 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 26 Mar 2007 22:44:20 -0700 Subject: Comment stsetch SNF 2007-03-26 22:44:19: Recovered Jasmine's wafer Message-ID: Recovered broken wafer. the plastic screw caps are completely burned thru, and there are no more of them in stock to replace the burned ones. Order info: plastic caps- part number: 111291E02 (50 pack) From eenriquez at snf.stanford.edu Tue Mar 27 07:10:48 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Mar 2007 07:10:48 -0700 Subject: Problem stsetch SNF 2007-03-26 16:36:08: Broken wafer in the chamber Message-ID: Eric cleaned the chamber last night. Cycled a wafer and ran O2 clean with no problems. From eenriquez at snf.stanford.edu Tue Mar 27 07:11:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Mar 2007 07:11:50 -0700 Subject: Comment stsetch SNF 2007-03-26 22:44:19: Recovered Jasmine's wafer Message-ID: Thanks Eric. From kupnik at snf.stanford.edu Wed Mar 28 09:09:47 2007 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Wed, 28 Mar 2007 09:09:47 -0700 Subject: Problem stsetch SNF 2007-03-28 09:09:46: etch stopped 30 min before end Message-ID: In a 3 hours etch, sts stopped with the error signal of "Coil power out of tolerance". I reloaded wafer and tried to process again but it also stopped. No resist burning like last time observed From cbaxter at snf.stanford.edu Wed Mar 28 09:36:10 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 28 Mar 2007 09:36:10 -0700 Subject: Problem stsetch SNF 2007-03-28 09:09:46: etch stopped 30 min before end Message-ID: Run deep recipe and monitor rf and backside he pressure. RF power is stable and he pressure is @9.1sccm setpoint @9.0sccm.