Problem stsetch SNF 2007-03-08 01:48:32: Coil power error if holder used

joongsun at snf.stanford.edu joongsun at snf.stanford.edu
Thu Mar 8 01:48:32 PST 2007


It was okay if holder is not used but whenever I use holder not to break wafer, coil power was out of tolerance.
Maybe some problem of holder ( I found holer is not flat)




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