Shutdown stsetch SNF 2007-03-13 15:30:19: Wafer broke in the chamber

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Mar 13 15:30:20 PDT 2007


Wafer broke after loading in the chamber. Broke into
2 piece. This is a whole wafer, no etch was done.




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