Problem stsetch SNF 2007-03-23 01:33:29: helium flow problem

kupnik at snf.stanford.edu kupnik at snf.stanford.edu
Fri Mar 23 01:33:30 PDT 2007


helium gas flow low, resist burning.
We etched 3 hours, then another 20 min. After the first etch everything was fine. During the second it gave a error message and we saw a lot of resist burning




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