Problem stsetch SNF 2007-03-28 09:09:46: etch stopped 30 min before end

kupnik at snf.stanford.edu kupnik at snf.stanford.edu
Wed Mar 28 09:09:47 PDT 2007


In a 3 hours etch, sts stopped with the
error signal of "Coil power out of tolerance".
I reloaded wafer and tried to process again but it also stopped.
No resist burning like last time observed




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