Problem stsetch SNF 2007-03-28 09:09:46: etch stopped 30 min before end

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Mar 28 09:36:10 PDT 2007


Run deep recipe and monitor rf and backside he pressure.
RF power is stable and he pressure is @9.1sccm setpoint 
@9.0sccm.




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